论文部分内容阅读
PHI-5300X射线光电子能谱仪(简称XPS),是美国珀金-埃尔默公司(P-E)的产品,清华大学分析中心于1984年12月引进,并于1985年12月正式投入运行。XPS主要用于各种固体材料与薄膜的表面元素成分及化学状态分析,如催化剂、半导体、超导材料、纳米材料等,因而在科研及教学中越来越受到人们的重视。尤其在化学、物理与材料科学的相互渗透,交叉学科的深入发展,从原子、分子尺度上研究物质的结构与其性能的关系,都离不开XPS提供的信息。 该仪器已经使用达十四年之久,部件老化现象日
PHI-5300 X-ray Photoelectron Spectroscopy (XPS) is a product of PerkinElmer Inc. (P-E) in the United States. The Tsinghua University Analysis Center was introduced in December 1984 and formally put into operation in December 1985. XPS is mainly used for the surface elemental composition and chemical state analysis of various solid materials and thin films, such as catalysts, semiconductors, superconducting materials, nanomaterials, etc., and is therefore attracting more and more attention in research and teaching. In particular, the mutual penetration of chemistry, physics and materials science, the further development of interdisciplinary research, and the relationship between the structure and properties of matter at atomic and molecular scales can not be separated from the information provided by XPS. The instrument has been used for up to fourteen years, the component aging phenomenon day