论文部分内容阅读
场发射电子显微镜是新型超高精密的设备 ,其对机房安装环境有特殊要求。为保证这种电子显微镜获得高分辨率图像 ,必须严格控制震动和环境磁场的干扰。本文对场发射电子显微镜实验室的防磁、防震和接地等问题进行分析 ,通过实际施工后的现场检测证实本设计满足了场发射电镜室对环境的技术要求 ,保证了我校两台场发射电镜顺利安装验收。
Field emission electron microscope is a new ultra-high precision equipment, the installation of the engine room has special requirements. In order to ensure that this electron microscope obtains high-resolution images, the interference of vibrations and environmental magnetic fields must be strictly controlled. In this paper, the field emission electron microscope laboratory anti-magnetic, shock and grounding and other issues were analyzed by field testing after the actual construction confirmed that the design of the field to meet the environmental requirements of field emission electron microscope room to ensure that our two field emission electron microscope Smooth installation and acceptance.