应用正交表试验设计法研究了MnBi薄膜制备工艺对其磁光优值的影响,锰对铋的比值、热处理温度以及两者的交互作用对磁光优值有显著的影响,其中交互作用的影响特别显著,其余三个工艺因素(热处理时间、离子轰击和冷阱种类)在被考察的范围内对磁光优值没有明显的影响。还提出一种测量光吸收系数的方法,可用来测量光密度较大的薄膜,只要在测量Faraday旋光的设备上稍加改装即能实现。 The influence of the preparation process of MnBi thin films on the magneto-optical merit, the ratio of manganese to bismuth, the heat treatment temperature and the interaction between the two have significant effects on the magneto-optical merit, and the interaction between them The influence is particularly significant. The remaining three process factors (heat treatment time, ion bombardment and cold trap types) have no significant effect on the magneto-optical merit in the investigated range. A method of measuring the light absorption coefficient has also been proposed to measure films with high optical densities, as long as a slight modification of the Faraday polarimeter can be implemented.