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介绍了一种制备膜厚为数微米的均匀相和非均匀相(准周期性多层膜)铁电薄膜的有效方法,研究了 PZT 平面波导结构的光波导特性及准周期性多层铁电薄膜的布拉格反射特性。研究表明厚度在数微米的均匀相铁电薄膜膜层致密,棱镜耦合实验表明该铁电薄膜波导层对光波的传播有良好的限定性能。准周期铁电多层薄膜具有良好的布拉格反射特性,周期数为10以上的铁电多层膜样品在室温下具有90%以上的反射率和约40 nm 的反射带宽。
An effective method for preparing ferroelectric thin films with uniform thickness of several microns and heterogeneous phase (quasi-periodic multilayer films) is introduced. The optical waveguide characteristics and quasi-periodic multilayer ferroelectric thin films of PZT planar waveguide are studied. Bragg reflection characteristics. The results show that the uniform ferroelectric thin film with a thickness of several micrometers is dense, and the prism coupling experiments show that the ferroelectric thin film has good confinement of light wave propagation. The quasi-periodic ferroelectric multilayer films have good Bragg reflection characteristics. The samples of ferroelectric multilayer with period of more than 10 have the reflectivity above 90% and the reflection bandwidth of about 40 nm at room temperature.