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报道了一种新型的成象检测系统——共焦激光扫描显微镜,介绍了成象原理、性能和应用范围.该显微镜利用光学共焦方法,可对样品结构实现三维分层成象或结构高度差的定量测量.与传统光学显微镜相比,具有更高的分辨率(空间分辨率优于0.2μm)和更高的对比度,同时还具有光电成象功能.文中给出了该显微镜对几种集成电路检测的结果.共焦激光扫描显微镜可作为大规模集成电路等半导体器件、材料和其它样品(如生物样品)的一种方便、有效、非接触式、非损伤性的检测系统.
A new imaging detection system, confocal laser scanning microscope, is introduced, which introduces the imaging principle, performance and application scope.The optical confocal method can be used to realize three-dimensional layered imaging or structure height Poor quantitative measurement. Compared with the traditional optical microscope, with a higher resolution (spatial resolution better than 0.2μm) and higher contrast, but also has the function of the photoelectric imaging.In this paper, given the microscope on several Confocal laser scanning microscopy can be used as a convenient, effective, non-contact, non-invasive detection system for semiconductor devices, materials and other samples such as biological samples on large scale integrated circuits.