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运用电磁场理论对金属波导膜厚测量的原理进行了详细分析,并且研制了一台膜厚测量仪,理论和实践表明:可以通过测量复合金属波导膜系励磁电流的脉冲波形来控制薄膜的生长厚度。
The principle of the electromagnetic waveguides film thickness measurement is analyzed in detail by using the electromagnetic field theory, and a film thickness measuring instrument is developed. The theory and practice show that the thickness of the film can be controlled by measuring the pulse waveform of the exciting current of the composite metal waveguide film system .