一、前言 薄膜材料的类型较多,本文所谈的是金属薄膜和介质薄膜。正如大家所知道的,这两类薄膜广泛地用于各种电子元器件、薄膜集成电路以及半导体集成电路。 对于这两类薄膜,可以说,它们最重要的电性参数是电导率。因此,本文试图系统地论述这两类薄膜的电导率。 I. Introduction There are many types of film materials, this article is about the metal film and dielectric film. As we all know, these two types of films are widely used in various electronic components, thin film integrated circuits and semiconductor integrated circuits. For both types of films, it can be said that their most important electrical parameter is the electrical conductivity. Therefore, this article attempts to systematically discuss the conductivity of these two types of films.