基于隧道效应的三维ｎｍ级轮廓仪华中理工大学纳米技术研究室研制的三维ｎｍ级轮廓仪是集计算机、机电控制与纳米技术与一体的高级检测仪，该轮廓仪获国家科技进步二等奖．其优良的控制系统与定点逐级放大（Ｚｏｏｍｉｎｇ）技术，能在不同的分辨率尺度上考察表面超微观... 3D nm Profiler Based on Tunneling Effect The 3D nm Profiler developed by the Nanotechnology Research Center of Huazhong University of Science and Technology is an advanced detector integrating computer, electromechanical control and nanotechnology. The profiler won the second prize of National Science and Technology Progress Award. Its excellent control system and fixed point zooming (Zoom-ing) technology can examine the surface microscopic view at different resolution scales...