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我们已经制作出多层ZnO声换能器,作为毫米波段高效声波激励。换能器由厚度为半波长的具有交替晶体结构的ZnO薄膜构成。在液氮温度下测量双向未调谐转换损耗,近29GHz时为27dB,96GHz时为50dB。
We have produced multilayer ZnO acoustic transducers that act as millimeter-wave efficient acoustic stimuli. The transducer consists of a ZnO thin film with an alternating crystal structure with a half-wavelength thickness. Measurement at liquid nitrogen temperature bidirectional un-tuned conversion loss of 27 dB at approximately 29 GHz and 50 dB at 96 GHz.