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一、引言 近年来,由于原材料的短缺,因此用涂层法和表面处理法来改善金属表面的机械性能和化学性能,已越来越显得重要。这一发展经历了从改进传统的涂漆法、塑料涂层法,到采用现代的化学气相喷镀(CVD)和物理气相喷镀(PVD)技术所获得的硬化层的过程。 在这个领域内,离子束方法显示出了有意义的新发展。它的特点是,用厚度≤1微米的很薄的表面合金来代替表面涂层;并且作为非平衡方法,实际上它允许由任何基体材料与表面处理元素进行组合。多年来,这
I. INTRODUCTION In recent years, due to the shortage of raw materials, it has become more and more important to improve the mechanical and chemical properties of metal surfaces by the coating method and the surface treatment method. This development has gone through improvements from the traditional lacquering and plastic coating methods to hardened layers obtained using modern chemical vapor deposition (CVD) and physical vapor deposition (PVD) techniques. In this area, ion beam methods have shown significant new developments. It features a thin surface alloy with a thickness of ≤1 μm instead of the surface coating; and as a non-equilibrium method, it actually allows the combination of any matrix material with the surface-treated element. Over the years, this