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研制晶片自动分选机的主要难点是晶片自动分选机测试系统的研制。其测量特点决定了考虑测量气隙时晶片的电参数模型不同于理想的电参数模型。建立了有气隙晶片的理论电参数模型，并讨论了气隙对频率测量的影响。有测量气隙时晶片的谐振频率的大小和起振难易主要取决于测量气隙的大小。根据有气隙测量时晶片谐振频率的测量原理进行了晶片自动分选机频率测试系统的设计。最后对建立的电参数模型进行了实验验证。
Development of automatic chip sorting machine is the main difficulty of automatic chip sorting machine test system development. Its measurement characteristics determine that the electrical parameter model of the wafer is different from the ideal electrical parameter model when considering the measurement of the air gap. The theoretical electric parameter model of air gap wafer is established and the influence of air gap on frequency measurement is discussed. Measuring the air gap when the resonant frequency of the chip size and start-up depends on the difficulty of measuring the size of the air gap. According to the principle of measuring the resonant frequency of the wafer with air gap measurement, the design of the frequency automatic test system of the wafer sorter was carried out. Finally, the established electric parameter model is verified experimentally.