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用模板法合成了介孔二氧化硅SBA-15,为了改善其湿敏特性进行了金属盐掺杂。通过扫描电子显微镜(SEM)和XRD对纯质介二氧化硅SBA-15以及不用金属盐掺杂材料的形貌和结构进行了表征。在11%RH到95%RH的范围内研究了纯SBA-15和不同金属盐掺杂SBA-15材料的湿敏特性。结果表明:适量的金属盐掺杂能很好的提高了介孔硅SBA-15材料的湿敏特性。不同金属盐掺杂SBA-15材料的响应恢复时间也比较迅速,响应时间都在60 s以内,而恢复时间都在180 s以内,能够满足湿度传感器的应用需要。
The mesoporous silica SBA-15 was synthesized by the template method, and the metal salt was doped to improve its hygroscopic property. The morphologies and structures of pure mesoporous silica SBA-15 with or without metal salt doping were characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The moisture sensitive properties of pure SBA-15 and different metal salt doped SBA-15 materials were investigated in the range of 11% RH to 95% RH. The results show that proper doping of metal salts can improve the moisture sensitivity of mesoporous SBA-15. Different metal salt doped SBA-15 material response recovery time is relatively fast, the response time is less than 60 s, and the recovery time are within 180 s, to meet the application needs of the humidity sensor.