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电子束光刻机是微细加工技术中关键的高精度技术设备之一,美、英、日、德、法等先进技术国家大力投资开发,诸多厂家把产品投放国际市场,竞争激烈。近年来,半导体产品国际市场出现肃条迹象,而电子束光刻机的价格却保持不衰,甚至时有上涨。从国际市场销售情况看,百分之八十左右用于制板技术,但近年来直接写器件的机器的制作和使用,出现了增加的趋势。英国剑桥公司的EEMF10.5型机的推出,表明该公司电子束微细加工机的进一步更新,力图挤身于国际市场先进电子束光刻机行列之中,据悉美国仙童公司已订购一台。 本文根据笔者赴英考察果和有关的调研、座谈资料,加之本人的理解体会整理而成。不当之处,望请指正。
Electron beam lithography is one of the key high-precision technical equipment in micro-fabrication technology. The United States, Britain, Japan, Germany, France and other advanced technology countries invested heavily in the development. Many manufacturers put their products on the international market with fierce competition. In recent years, there have been signs of suicide in the international market of semiconductor products. The price of electron beam lithography machines has not deteriorated, and sometimes even increases. Judging from the international market sales, about 80% are used for board technology, but in recent years, there has been an increasing trend in the production and use of machines that directly write devices. The introduction of the EEMF10.5 machine from Cambridge, England, shows that the company has further updated its electron beam micromachining machine and is trying to get into the ranks of the advanced electron beam lithography machines in the international market. It is reported that Fairchild USA has ordered one. This article is based on the author’s visit to the United Kingdom fruit and related research, discussion materials, combined with my understanding of finishing compilation. Inappropriate, please correct me.