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针对现有测量方法存在的问题,基于测量状态与加工状态一致的检测原理,设计了环面蜗杆精度测量原理。通过设置自动标定程序和高精密时栅转台使系统自动建立三维空间的测量坐标系,并利用坐标旋转法测得测头的回转半径。采用随动控制方式来测量环面蜗杆各齿面的点在测量坐标系中的坐标值,从而得到环面蜗杆的精度。系统采用金字塔式的结构使系统更稳定、可靠性强。通过实验,验证了本方案的可行性,测得环面蜗杆螺旋线的误差为±4μm。对系统进行等精度重复性实验,系统的极差为0.9μm,方差分析说明各测量点的误差值无显著差异。
Aiming at the existing problems of existing measurement methods, the principle of measuring the accuracy of toroidal worm is designed based on the principle that the measurement state and the machining state are consistent. By setting the automatic calibration program and the high-precision time-grating stage, the system automatically establishes the measurement coordinate system in three-dimensional space and uses the coordinate rotation method to measure the radius of gyration of the probe. Adopting the follow-up control method to measure the coordinate value of each tooth surface of the toroidal worm in the measurement coordinate system, so as to obtain the precision of the toroidal worm. The system uses a pyramid structure to make the system more stable and reliable. Through experiments, the feasibility of this scheme was verified. The error of toroidal spiral worm was ± 4μm. The accuracy of repeatability experiments was carried out on the system. The range of the system was 0.9μm. The analysis of variance showed that there was no significant difference in the error of each measuring point.