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应用多极场理论,研究了大偏转角情况下的偏转象差,给出了应用十极场做五级象差校正时的场表达式,计算了在多种情况下十极场对五级象差校正的影响,分析了多极场象差校正的方法.
The multi-polar field theory is used to study the deflection aberration under the condition of large deflection angle. The field expression is given when the five-level aberration is corrected by using the ten-pole field. The effect of aberration correction is analyzed and the method of multi-polar field aberration correction is analyzed.