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在TFT-LCD的生产过程中,取向层表面针孔缺陷是造成产品不良的常见原因。应用聚焦离子束(FIB)、扫描电子显微镜(SEM)和光学测量系统(OMS)工具,并结合数据统计软件Business Objects(BO)对实际生产过程中的一种典型产品不良——黑点,进行了测试和分析。结果表明,取向层表面针孔缺陷是产生黑点不良的根本原因。在此基础上,进一步通过理论分析和实验研究证明,成膜过程中膜液的流体力学不稳定性是导致取向层表面针孔缺陷的重要原因,而固化时间则是影响流体力学不稳定性的重要参数。膜液流体力学不稳定性的充分发展并最终对膜结构产生影响需要一定时间,当固化时间接近甚至小于不稳定性充分发展的时间时,取向层表面产生针孔缺陷的机会将大大减小甚至消除。
In the production of TFT-LCD, pinhole defects on the surface of the alignment layer are common causes of product failure. Focused ion beam (FIB), scanning electron microscopy (SEM) and optical measurement system (OMS) tools were used in combination with Business Objects (BO), a data statistics software, to analyze a typical product in actual production process - black spots The test and analysis. The results show that the pinhole defects on the surface of the alignment layer are the root cause of the dark spots. On this basis, further theoretical analysis and experimental studies have proved that the hydrodynamic instability of the membrane liquid during the film formation is an important reason for the pinhole defects on the surface of the alignment layer, while the curing time is a factor affecting the hydrodynamic instability Important parameters. The full development of hydrodynamics instability of membranes and the consequent impact on the membrane structure will take some time. When the curing time is close to or even less than the full development of instability, the chance of pinhole defects on the surface of the alignment layer will be greatly reduced. eliminate.