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This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier’s angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier,and the angular velocity of the rotating carrier itself.
This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier’s angular velocity, the silicon was manufactured by anisotropy etching.The design, fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.