在扫描电子显微镜中的聚焦电子束强段若以频率f调制,在试样内由于非弹性散射初级电子将偿失能量而在试样内形成一突变热源,并由此而激发出相应的应力波,通过与试样相耦合的压电换能器检测该声波,并输出信号到适当的检测系统,就可以得到试样亚表面的像。本文将简要介绍扫描电子 In the scanning electron microscopy of the strong electron beam if the modulation of the frequency f modulation in the sample due to inelastic scattering of primary electrons will lose energy in the sample to form a mutation in the heat source and thus stimulate the corresponding stress Wave, through the piezoelectric transducer coupled with the sample to detect the sound waves, and the output signal to the appropriate detection system, you can get the sample subsurface image. This article will briefly introduce scanning electronics