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光学细分(λ/100)的干涉仪,要求具备一个能够实现调整灵敏度为0.01μm,调节范围为0.01μm～10mm的连续可调的微调精细工作台,这就必须有能实现调整灵敏度为百分之一微米级、十分之一微米级、微米级和毫米级的机构予以衔接,否则不能满足工作要求。一、结构设计为了实现毫米级(1～10mm)的调整,上下调整是通过移动副台上一平板,前后调整是移动在主台上的另一平板。前者为手动定位结构,后者采用螺距为0.5mm的微动螺丝机构。实现微米级和十分之一微米级的调整机构,以及二者相互关连是本台结构设计上的关键。采取以轴承光杠为元件,构成导程小于0.1mm的螺旋器和杠杆连用机构,和螺旋推
An optical subdivision (λ / 100) interferometer requires a continuously adjustable fine-tuning fine table capable of adjusting the sensitivity to 0.01 μm and the adjustment range from 0.01 μm to 10 mm. This requires that the adjustment sensitivity be one hundred One-tenth of a micron, one tenth of a micron, micron and millimeter-level institutions to connect, or can not meet the job requirements. First, the structural design In order to achieve mm-level (1 ~ 10mm) adjustment, up and down adjustment is by moving a plate on the sub-stage, before and after the adjustment is to move the other on the main stage plate. The former is a manual positioning structure, the latter with a thread pitch of 0.5mm micro-screw mechanism. To achieve micron and tenths of micrometer-level adjustment mechanism, and the two are related to each other is the key to the structural design of this station. To take the bearing light bar as a component, constitute the lead less than 0.1mm screw and lever with the agency, and the spiral push