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变线距光栅是一种自消部分象差的光学元件。本文提出了用激光束检测变线距系数的理论模型。计算表明变线距光栅的衍射波与平面波的干涉条纹可以用于检测变线距系数.
Variable pitch raster is a self-eliminating part of the aberration of optical components. In this paper, the theoretical model of detecting the variation of pitch coefficient with laser beam is proposed. Calculations show that the diffraction fringes of the variable pitch grating and the interference fringes of the plane wave can be used to detect the variable pitch coefficient.