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本文提出了超镜工程表面相位粗糙度的概念。它是介于工程镜面与理想镜面之间的一个新的表面层次,其表面的几何状态,对表面的力、热、电、光学性质都有明显的影响。文中分析了表面层的几何结构,并把它的表面粗糙度看成是一个统计参数。从表面微观分析,讨论了微粒子束在反射复场内的相关函数,从而导出了相位粗糙度与表面反射系数的关系表达式。
This paper presents the concept of super-mirror surface roughness. It is a new surface layer between the mirror of the project and the ideal mirror. Its surface geometry has obvious influence on the surface force, heat, electricity and optical properties. In this paper, the geometry of the surface layer is analyzed and its surface roughness is considered as a statistical parameter. From the surface microscopic analysis, the correlation function of the particle beam in the reflection complex field is discussed, and the expression of the relationship between the phase roughness and the surface reflection coefficient is deduced.