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针对3kW大功率射频板条CO_2激光器的多组电极放电均匀性与阻抗匹配性问题,采用麦克斯韦时域差分法构建了多组电极下的放电模型,获得了最佳放电均压效果的均压电感值。以放电区等效阻抗值为基础结合均压电感值得到极板放电的总负载阻抗值。利用总负载阻抗值并通过Smith圆图获得与之对应的匹配网络阻抗参数,使总负载阻抗与匹配网络阻抗之和为纯电阻50Ω,实现射频输入功率的完全馈入。实际测得当放电均匀与阻抗匹配时驻波比为1.18。研究结果表明,在时域差分法模型中增加匹配的均压电感后,极板整体放电均匀性波动从之前的15%降低到2.8%,且每组电极的放电均匀性差异控制在0.3%以内。放电实验表明,在放电均匀且阻抗匹配情况下,对应激光器输出功率为3.1kW,且在2h内波动可稳定在±1%以内。
Aiming at the problem of the discharge uniformity and the impedance matching of multiple groups of electrodes in 3kW high-power RF slab CO_2 laser, the discharge model of multiple groups of electrodes was constructed by Maxwell’s time-domain difference method, and the optimal voltage- Sense value. Based on the equivalent impedance of the discharge zone, the total load impedance of the plate discharge is obtained based on the voltage-sharing inductance. Using the total load impedance value and the Smith network diagram to obtain matching network impedance parameters, the sum of the total load impedance and the matching network impedance is a pure resistance of 50Ω, so as to completely feed in the RF input power. The actual measured when the discharge is uniform and impedance matching VSWR of 1.18. The results show that the uniformity of discharge uniformity decreases from 15% to 2.8% after adding matching voltage-sharing inductances in time-domain difference method, and the uniformity of discharge uniformity of each electrode is controlled at 0.3% Within. Discharge experiments show that under the condition of uniform discharge and impedance matching, the corresponding laser output power is 3.1kW, and the fluctuation can be stabilized within ± 1% within 2h.