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利用溅射法制作的钛 镍形状记忆合金薄膜作为推动微型泵和微型阀门用的强力微型致动器而受到广泛关注。钛 镍合金薄膜能得到如同大块材料一样或者更好的性能。特别是含Ｔｉ过量的钛 镍合金薄膜 ,由于形成更加微细的显微组织而改善了力学性能和形状记忆特性。但目前几乎还没
Titanium-nickel shape memory alloy thin films produced by sputtering have attracted much attention as powerful micro-actuators for micro-pumps and microvalves. Titanium-nickel alloy film can get the same as the bulk material or better performance. In particular, titanium-nickel alloy films containing an excessive amount of Ti improve the mechanical properties and the shape memory properties due to the formation of more fine microstructures. But almost not yet