在航天、国防、医学、核物理等领域，有着对仪器设备向小型化、复杂化、集成化方向发展的要求。在这一动力驱动下，精密机械加工、 Ｌ Ｉ Ｇ Ａ 技术以及硅技术有了长足发展，制造出许多部件和产品。但对于复杂的微机电系统，单靠这些技术难以实现，需要进行系统的装配工作。微夹钳也是在这一需求下发展起来的。除此之外，在细胞操作和其他微细操作过程中也迫切需要这样的执行软件。本文利用 Ｌ Ｉ Ｇ Ａ 技术进行了这方面的研究工作，并得到了一些结果。 In the fields of aerospace, defense, medicine and nuclear physics, there is a demand for the development of miniaturization, complication and integration of instrumentation and equipment. Driven by this momentum, precision machining, LIGA technology and silicon technology have made great strides to create many components and products. But for the complicated micro-electromechanical system, it is difficult to realize these technologies alone, and the system needs to be assembled. Micro-clamp is also developed under this demand. In addition to this, there is an urgent need for such execution software during cell operations and other microfracture operations. In this paper, LIGA technology was used in this research work and some results were obtained.