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真空量值的校准,目前主要以各大科研所和公司研发的以比较法校准方法为基础的校准装置来进行校准活动。在一些项目中,由于经常出现整套设备安装后无法频繁拆卸,送检容易使得仪器受损,送检周期较长等原因,不宜采用真空计拆卸并送校实验室的方案,而是需要采用现场校验的方法更容易实现。文章尝试对真空现场校准装置进行设计,并评估此计量标准是否符合计量标准考核的要求。
The calibration of the vacuum volume is mainly carried out with the calibration devices based on the comparative method of calibration developed by major scientific research institutes and companies. In some projects, due to frequent installation of the entire equipment can not be frequently disassembled, the submission is easy to make the instrument damage, the inspection period longer and other reasons, should not be removed by the vacuum gauge and sent to the school laboratory program, but the need to use the scene The method of verification is easier to implement. The article attempts to design the vacuum field calibration device, and assess whether the measurement standard meets the requirements of the measurement standard assessment.