论文部分内容阅读
压膜前铜表面微观粗糙度和表面活性直接影响图形转移的质量,不同的前处理方式和铜面所得到的铜层表面组成亦不同。研究表明:①表面粗糙度 Ra:0.2—04microns;Rz:1.6—3.2microns; 粗糙因子 R:6.5—7;高于平均高度的峰数:≥14/mm;单位长度的凹凸点数:900—1600/cm 的表面是较理想的压膜表面。②不同的铜表面所形成的表面层化学组成,主要含有 Cu、Cu~+、Cu~(2+),三者的浓度随着前处理后放置时间的变化而变化。
The micro-roughness and surface activity of the copper surface before the film directly affect the quality of the pattern transfer. The different pre-treatment methods and the surface composition of the copper layer obtained from the copper surface are also different. The results show that: ① surface roughness Ra: 0.2-04microns; Rz: 1.6-3.2microns; Roughness factor R: 6.5-7; height above the average height of the peak: ≥ 14 / mm; unit length of the bump points: 900-1600 / cm of the surface is the ideal film surface. The chemical composition of the surface layer formed by different copper surfaces mainly contains Cu, Cu ~ +, Cu ~ (2+). The concentrations of the three changes with the time after pretreatment.