以噪声性质存在的微振动信号是造成干扰和影响机械加工精度的主要因素之一,消除干扰的前提是对微振源的准确测量和定位。针对现有基于光纤的定位系统存在的不足,设计了一种基于全光纤微振传感器的微振源定位系统,该系统要求最少4个微振传感器,通过同时测量3个传感器相对于另一个传感器的振动信号到达时间差(TDOA)来计算微振源的位置。通过实验对传感器和定位系统的性能进行验证,相对定位误差低于0.56%,且系统稳定可靠。 The micro-vibration signal with the noise nature is one of the main factors that cause interference and affect the machining accuracy. The premise of eliminating interference is to accurately measure and position the micro-vibration source. Aiming at the shortcomings of the existing optical fiber-based positioning systems, a micro-vibration source positioning system based on all-optical micro-vibration sensors is proposed. The system requires a minimum of 4 micro-vibration sensors, which can measure 3 sensors at the same time with respect to the other sensor Of the vibration signal arrival time difference (TDOA) to calculate the location of the micro-vibration source. The performance of the sensor and the positioning system is verified through experiments. The relative positioning error is less than 0.56%, and the system is stable and reliable.