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总结了薄膜应力的一些测量方法。将经常使用的方法归纳为激光宏观变形分析法和X射线分析法。介绍了利用测量基片弯曲曲率的激光宏观变形分析法(包括激光干涉法和激光束偏转法)和晶格变形的X射线衍射法等测量薄膜应力的理论依据及其测量原理,计算了各种测量方法的测量精度,X射线分析法的精度最高,其次是激光干涉法,而激光束偏转法的精度最低,分析了激光分析法和X射线分析法的优缺点。
Summarized some methods of measurement of film stress. The commonly used methods are summarized as laser macro deformation analysis and X-ray analysis. The theoretical basis and measurement principle of measuring the stress of thin film by laser macro deformation analysis (including laser interferometry and laser beam deflection method) and X-ray diffraction of lattice deformation are introduced, and the calculation methods of various The measurement accuracy of the measurement method, X-ray analysis of the highest accuracy, followed by laser interferometry, and laser beam deflection method of the lowest accuracy, analysis of laser analysis and X-ray analysis of the advantages and disadvantages.