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REVO~(TM)是基于正交式坐标测量机设计和应用的、能够同时实现高效高精度测量的动态测头系统。针对REVO五轴测量系统在非正交式坐标测量机中应用的问题,提出了REVO测头探针变形量的标定方法,并从测量系统返回的有限数据中分离出了各主轴的光栅数据,实现了测量点三维坐标数据的重构。实验验证了所提出标定方法和各主轴光栅值提取的有效性和正确性。实验结果表明,经过探针变形量补偿后,测量误差最大值从0.202 1mm降低到0.000 9mm,所提取出的各主轴光栅值变化量降低了两个数量级。
REVO ~ (TM) is based on orthogonal coordinate measuring machine design and application of high-precision, high-precision measurement of the dynamic probe system. Aiming at the problem of REVO five-axis measurement system applied in non-orthogonal coordinate measuring machine, the calibration method of REVO probe probe deformation is put forward and the raster data of each spindle is separated from the finite data returned by the measurement system. The reconstructed 3D coordinate data of the measuring point is realized. The validity and correctness of the proposed calibration method and the spindle grating extraction are validated experimentally. The experimental results show that after the compensation of the probe deformation, the maximum measurement error decreases from 0.202 1mm to 0.0009mm, and the variation of the grating aberration decreases by two orders of magnitude.