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研制了一种基于高刚度PZT作动器的超精密定位工作台 ,其特点是采用弹性铰链预紧和提供工作台侧向刚度 ,结构简单 ,动态响应速度快 ,分辨率高 .为防止PZT作动器受到过大弯力作用和动平台弯曲变形 ,在动平台与PZT作动器间加入弹性缓冲环节和辅助弹性隔离板 .另外 ,对工作台输入输出特性、静动态刚度和模态振型、以及受外力作用时产生的静态位移误差进行了试验研究 .试验数据表明 ,该工作台可作为精密磨床的辅助工作台 ,极大地提高机床的定位精度
A super precision positioning table based on PZT actuator with high rigidity is developed, which is characterized by prestressing elastic hinge and providing lateral rigidity of worktable, with simple structure, fast dynamic response and high resolution.In order to prevent PZT The actuator is subjected to excessive bending force and the bending deformation of the moving platform, the elastic cushioning section and the auxiliary elastic isolation plate are added between the moving platform and the PZT actuator, and the input / output characteristics, the static and dynamic stiffness and the mode shape , As well as the static displacement error caused by the external force were tested.Experimental data show that the table can be used as an auxiliary workbench for precision grinding machines to greatly improve the machine tool positioning accuracy