NX Nano Sensor采用电容性测微技术,位置测量灵敏度达到原子级别。这种先进的非接触式位置测量系统依赖于两个传感器板:一个用作目标,一个用作探头,而在它们之间则形成一个平行板电容器。通过采用适当的电子控制器,这两个板之间的距离可以准确地确定。NX Nano Sensor的主要应用包括阶段反馈、振动测量、计量、变形测量、精密制造,漂移测量、精密波束控制和显微镜等。NX Nano Sensor测量精度高于7pm,线性度为 The NX Nano Sensor uses capacitive micrometer technology to achieve atom-level position measurement sensitivity. This state-of-the-art, non-contact position measurement system relies on two sensor boards: one for the target, one for the probe, and a parallel plate capacitor between them. By using a suitable electronic controller, the distance between the two plates can be accurately determined. NX Nano Sensor’s main applications include phase feedback, vibration measurement, measurement, deformation measurement, precision manufacturing, drift measurement, precision beam control and microscopy. NX Nano Sensor measurement accuracy above 7pm, linearity is