论文部分内容阅读
介绍了最新设计的二级透镜聚焦离子束系统，该系统具有高速消隐、束径束流电可调等特征。给出了该系统的设计计算和调测结果。在束能15keV、束流30pA时，束径达到0．1μm。
The newly designed secondary lens focused ion beam system is introduced. The system has such features as high speed blanking and tunable beam current. The design calculation and test result of the system are given. When the beam energy is 15keV and the beam current is 30pA, the beam diameter reaches 0.1μm.