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基于MEMS工艺制造的薄膜体声波谐振器(FBAR)是一种新型的质量传感器,在气相环境中具有极高的Q值,但在液相环境中,由于液体阻尼作用,FBAR的Q值大幅降低.本文提出了一种谐振器与微流道集成的解决方案,避免了谐振器和液体的大范围接触,有效提高了谐振器的Q值.通过设计新的加工流程,利用标准MEMS工艺实现了微流道和谐振器的集成.将该集成器件用于葡萄糖浓度的检测,结果表明其具有较小的检测极限和极高的线性度.由于充分利用了MEMS技术能进行大批量器件加工的特点,可极大地降低器件成本.集成微流道后,大大降低了样品的使用量,可实现对微升级别样品的检测,在微量检测中具有重要的应用前景.
A thin film bulk acoustic resonator (FBAR) based on MEMS technology is a new type of mass sensor with very high Q in a gas phase environment. However, in a liquid phase, the FBAR’s Q value is significantly reduced due to liquid damping In this paper, a solution to the integration of resonator and microchannel is proposed, which avoids the wide contact between the resonator and the liquid and effectively increases the Q value of the resonator. By designing a new processing flow and using standard MEMS technology Micro-channel and resonator integration. The integrated device for the detection of glucose concentration, the results show that it has a smaller detection limit and high linearity.Because of the full use of MEMS technology can handle large quantities of features of the device , Which can greatly reduce the cost of the device.After integrating the microchannel, the usage of the sample is greatly reduced, and the detection of the micro-level sample can be realized, which has an important application prospect in the micro-detection.