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为保证干涉仪的测量精度需严格控制其准直光路中平行光束波前质量,以口径150 mm的扩束镜出射波面为测试对象在Zygo干涉仪上设计实验,采用五棱镜扫描法逐条测试扩束镜某一方向上出射波面法线的微小变化量,实现一种精度高而又经济的大口径波面测试。实验结果与Zygo的测试结果相吻合,证实了这种方法的可行性。同时分析了实验装置与环境对测试精度的影响。
In order to ensure the measurement accuracy of the interferometer, the quality of the parallel wavefront in the collimated light path must be strictly controlled. The wavefront of the beam expander with the aperture of 150 mm is designed as the test object. The experiment is designed on the Zygo interferometer. A slight change in the normal of the outgoing wavefront in one direction of the beamsplitter enables a large-diameter wavefront test to be accurate and economical. The experimental results are consistent with the Zygo test results, confirming the feasibility of this method. At the same time, the influence of experimental equipment and environment on the test accuracy is analyzed.