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目的:探讨洁净室浮游粒子测点数的最低限度。方法:测点按FS209D的计算方法简化为查表法。在静态条件下测试,浮游粒子浓度的均值及其95%置信上限均应符合规定,方可判定该室达到规定的洁净级别。结果:若按FS209D的规定最低测点数取2点,各测点的均值虽可达标,但2点t值为6.3,故95%置信上限往往超标,若增加1个测点则无此弊。结论:洁净室尤其是小于10m2的小洁净室浮游粒子最低限度测点数应修正为3点,以免评定失误。
Objective: To explore the minimum number of clean particle floating point measurement. Methods: Measuring points by FS 209D calculation method is simplified to look-up table. Under static conditions, the mean value of the suspended particle concentration and its 95% confidence limit should be met in order to determine that the chamber has reached the specified cleanliness level. Results: If according to FS 209D minimum measuring points to take 2 points, although the average of each measuring point can reach the standard, but the 2 t value of 6.3, so 95% confidence limit is often exceeded, if an additional measuring point No such harm. Conclusion: The clean room, especially the small clean room less than 10m2 floating point particle size should be corrected to 3 points to avoid errors in assessment.