论文部分内容阅读
本实验利用扫描电子声显微镜对CaAs半导体外延片生长缺陷进行了电子声成像。通过分析不同条件下获得的电声图像,讨论了CaAs半导体外延片在电声成像中其电声信号的产生机制。实验结果显示这种成像技术在半导体材料微观分析与评价中具有巨大的应用前景
In this experiment, electronic acoustic imaging was performed on the growth defects of CaAs semiconductor epitaxial wafers by scanning electron microscopy. By analyzing the electro-acoustic images obtained under different conditions, the electro-acoustic signal generation mechanism of CaAs semiconductor epitaxial wafers in electro-acoustic imaging is discussed. The experimental results show that this imaging technique has great application prospect in the microscopic analysis and evaluation of semiconductor materials