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P47闪耀体,是当今各种SEM中,二次电子探测器的关键部件。它的主要性能是光输出效率η,即光电信增管接收的光子,与二次电子在闪耀体上激发光子数量之比。这除了直接取决于萤光粉本身发光特性外,还与闪耀体使用条件,制备方法有极大关系。我们对各种影响η的因素,作了专门实验分析,并摸索出一套与众不同,有自己特色的制备方法,提高了光输出效率,性能稳定,方法简单,重复性好。我们的实验用如图1装置进行;测量入射电流I_0,及光电倍增管转换的电子光流Ip,从而可计算光输出效率η(η=Ip/Io),并可以在完全相同条件下,比较不同闪耀体的η值。不难理解,萤光粉的光子产额,正比于电子能量和强度。但对于粉层厚度有限的闪耀体,η与能量并不一直保持直线关系,见图2。
P47 shining body, is today’s various SEM, secondary electron detector key components. Its main performance is the light output efficiency η, that is, phototesting by the tube to receive photons, and secondary electrons in the shining body excited photon number ratio. This depends not only directly on the luminescent properties of the phosphor itself, but also with the use of conditions, the preparation method has a great relationship. We have a variety of factors that affect the η, made a special experimental analysis, and explore a set of distinctive, have their own characteristics of the preparation method, improve the light output efficiency, stable performance, simple method, good repeatability. Our experiments were performed using the apparatus shown in Fig. 1; the incident current I_0 and the electron optical flow Ip converted by the photomultiplier tube were measured to calculate the light output efficiency η (η = Ip / Io), and under the same conditions, Different shining body value of η. It is not hard to understand that the photon yield of phosphor is proportional to the energy and intensity of electrons. However, for a shinny body with a limited layer thickness, η and energy do not always maintain a straight line, as shown in Figure 2.