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共面微波探针是裸芯片测量信号输入/输出的重要媒介,通过与晶圆片物理接触,建立起测量系统与芯片之间的信号连接通道。为了获得共面微波探针完整准确的S参数,设计并实现了“两步法”测量方案,首先在同轴端口进行校准,然后在探针尖端口进行第二步校准。通过与出厂数据进行对比分析,证明了方案的可行性,同时指出在片校准件预校准的重要性。另外,讨论了氧化铝和砷化镓两种材料在片SOLT校准件对于探针S参数提取中的影响,实验显示二者相角偏差达到39.8°,回波损耗呈现规则性的变化,全部测量数据的频段覆盖1~40 GHz,最终给出了优化的测量方案。
The coplanar microwave probe is an important medium for measuring and inputting / outputting the bare chip signal. Through the physical contact with the wafer, a signal connection channel between the measurement system and the chip is established. In order to obtain the complete and accurate S-parameters of coplanar microwave probes, a two-step measurement scheme was designed and implemented by first calibrating on a coaxial port and then performing a second calibration at the probe tip. Through the comparison with the factory data, the feasibility of the scheme is proved, and the importance of the pre-calibration of the calibration piece is pointed out. In addition, the effects of alumina and gallium arsenide (GaAs) on the extraction of probe S parameters were discussed. The experimental results show that the phase angle deviation between the two is 39.8 °, and the return loss shows a regular change. The frequency band of the data covers 1 ~ 40 GHz, and finally the optimized measurement scheme is given.