论文部分内容阅读
本文研究了用热解化学气相沉积方法在硅单晶衬底上制备的金刚石膜对硅衬底的红 外透过率的影响，发现有些金刚石薄膜具有明显的红外增透性质。
In this paper, the influence of the diamond film prepared on the silicon single crystal substrate by pyrolysis chemical vapor deposition on the infrared transmittance of the silicon substrate has been studied. Some diamond films have obvious infrared penetration enhancement properties.