半导体探测器在扫描电镜中用以观察背散射电子形貌和元素成分像,与X光面分布像配合,可更清楚地显示分析试样上不同元素的分布和含量。我们比较了几种国产同类探测器,确定由中科院半导体所为我们试制半导体片,其性能基本满足要求,从而实现了扫描电镜用的半导体探头的国产化。本文介绍这种半导体探头及相关的放大器的基本性能。 Semiconductor detectors are used in scanning electron microscopy to observe backscattered electron topography and elemental component images, in conjunction with X-ray distribution images, to more clearly show the distribution and content of different elements on the analyzed sample. We compare several domestically produced detectors of the same type, and confirm that the semiconductor chips manufactured by the Chinese Academy of Sciences Institute of Semiconductors have basically met the requirements of their performance, so as to realize the localization of semiconductor probes for SEM. This article describes the basic performance of this semiconductor probe and its associated amplifiers.