The impurities in two kinds of HfO2 materials and in their corresponding single layer thin films were determined through......

用两种不同纯度的HfO2 材料与同一纯度的SiO2 材料组合 ,沉积λ/ 4规整膜系 (HL) 11H形成 2 6 6nm的紫外反射镜 ,发现反射率相差 0......