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从理论上分析谐振器的静电制动特性和机械力学特性,给出了活动梳齿的谐振频率和谐振振幅的解析解,提供谐振器结构设计的依据.设计......

Frequency combs[1, 2] consisting of equally-spaced frequencylines can be fully described by two frequencies, i.e., carri......