【摘 要】
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Background, Motivation and Objective With the emergence of the shale gas the problem of reliable and cost-effective sensing of both carbon dioxide (CO2) and methane (CH4) is especially accentuated. In
【机 构】
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Panevezys Faculty of Technologies and Business, Kaunas University of Technology, Panevezys, Lithuani
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Background, Motivation and Objective With the emergence of the shale gas the problem of reliable and cost-effective sensing of both carbon dioxide (CO2) and methane (CH4) is especially accentuated. In our work we aim to design the CMUT based sensor platform, which would have the cross-selectivity and high sensitivity for CH4, CO2 and other gases. We selected capacitive micromachined ultrasound transducers (CMUT) approach, because they are well known for their ability to sense the mass loading of the transducer structure. For this purpose we designed, fabricated, assembled and tested surface micromachined CMUTs, which have necessary structure for required cross-selectivity due the different functional reagents. In this report we present the results of testing the polyethylenimine-modified CMUTs for CO2 sensing.
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