An inductively coupled plasma (ICP) system in which a remote ICP (expansion region) with large volume is attached to a main ICP (driver region) is developed.The axially and radially resolved measurements of the electron density,electron temperature and electron energy probability function (EEPF) for Ar discharge are systematically conducted by making use of Langmuir probe with respect to applied power and gas pressure.At the same time,the variation of electron density and electron temperature with external parameters is given by a fluid model,and a comparison between experimental and simulation results is illustrated also.