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Bending test of silicon nano-beam Young's Module
【机 构】
：
Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing,Jiangsu,CHINA
【出 处】
：
中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th
【发表日期】
：
2008年期
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