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Establishment of Two-Dimensional Chemically Non-Equilibrium Model of Ar-CO2-H2 Inductively Coupled T
【机 构】
:
DivisionofElectricalEngineering&ComputerScience,GraduateSchoolofNaturalScience&Technology,KanazawaUn
【出 处】
:
9th Asia-Pacific Conference on Plasma Science and Technology
【发表日期】
:
2008年10期
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