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The combination self-cleaning effect of trimethylaluminium and tetrakis(dimethyl-amino)hafnium pretr
【机 构】
:
National Laboratory of Solid State Microstructures,Department of Materials Science and Engineering,N
【出 处】
:
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
:
2012年4期
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