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采用射频磁控溅射技术在S304不锈钢和纯Cu基体上成功制备出了(AlCrMoNiTi)Nx和(AlCrMoZrTi)Nx高熵合金氮化物薄膜,采用微磨损试验机对两种薄膜的摩擦特性进行了研究。结果表明,(AlCrMoZrTi)Nx薄膜在S304不锈钢和纯Cu衬底上的最小摩擦因数分别为0.182和0.127,最高耐磨寿命为1 200s。在两种衬底上,(AlCrMoZrTi)Nx薄膜的摩擦性能均优于(AlCrMoNiTi)Nx薄膜,其原因主要在于薄膜中Zr的固溶强化效果高于Ni,因而薄膜的摩擦性能得到增强。两种薄膜在S304不锈钢和Cu衬底上的磨损机制主要为磨粒磨损。
The (AlCrMoNiTi) Nx and (AlCrMoZrTi) Nx high-entropy alloy nitride films were successfully prepared by RF magnetron sputtering on S304 stainless steel and pure Cu matrix. The tribological properties of the two films were studied by a micro-wear tester . The results show that the minimum friction coefficient of (AlCrMoZrTi) Nx film on S304 stainless steel and pure Cu substrate is 0.182 and 0.127, respectively, and the maximum wear life is 1 200s. On both substrates, the tribological properties of (AlCrMoZrTi) Nx films are better than that of (AlCrMoNiTi) Nx films. The reason for this is that the solid solution strengthening effect of Zr in the films is higher than that of Ni, so the tribological properties of the films are enhanced. The wear mechanism of the two films on S304 stainless steel and Cu substrate is mainly abrasive wear.