甲烷是典型的饱和烃,不能采用一般化学方法进行聚合。因此采用等离子体聚合方法研究甲烷的聚合规律及产物结构具有一定的意义。Kobayashi等应用内极聚合装置对烃类聚合进行了综合研究,并曾指出,饱和烃的沉积速率较慢,添加有机卤化物可加快沉积速率。借此证明烃类的等离子体聚合按游离基历程进行。本文应用外部电容耦合式 Methane is a typical saturated hydrocarbon that can not be polymerized by conventional chemical methods. Therefore, the use of plasma polymerization polymerization of methane research and product structure has a certain significance. Kobayashi et al. Conducted a comprehensive study of hydrocarbon polymerization using an internal polymerization unit and noted that the deposition rate of saturated hydrocarbons is relatively slow, and the addition of organic halides accelerates the deposition rate. This proves that the plasma polymerization of hydrocarbons according to the free radical process. This application of external capacitive coupling