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本文利用计算机辅助测试技术得到了不同栅压下沟道载流子有效迁移率的温度漂移特性曲线.实验结果表明,低温时温度漂移系数为负值,且随着温度的上升和栅压的增加而减小,在较高温度下,有一个零温漂区.在100℃以后有效迁移率的温度漂移系数出现了正值,文章对这些特性曲线进行了讨论,并且认为适当改变掺杂浓度和表面状态,将会改变沟道有效迁移率的温度漂移特性.
In this paper, the temperature drift characteristic curves of channel carrier mobility under different gate voltages are obtained by computer-aided test.The experimental results show that the temperature drift coefficient is negative at low temperature, and with the increase of temperature and gate voltage And decreases at higher temperature, there is a zero-temperature drift region.The temperature drift coefficient of effective mobility after 100 ℃ appears a positive value, the paper discussed these characteristics curves, and considered that appropriate changes in doping concentration and Surface conditions that will change the effective drift of the channel temperature drift characteristics.